To see any EU REACH substance of very high concern (SVHC) that may be contained within an Axcelis part, please enter a valid part number below and click the search button. Part numbers are case-sensitive.

Axcelis Part Number

SVHCs reported for a particular part number may be present in any amount, including quantities that constitute <0.1% by weight of the part. For the purposes of identifying substances of very high concern in Axcelis products, Axcelis relies on information provided to Axcelis by our material and component suppliers. Axcelis does not engage in independent verification of this information.

For more information, please email Axcelis Environmental, Health & Safety at